Used KLA Surfscan Wafer Inspection Equipment from ClassOne Equipment

When you need used KLA-Tencor Surfscan wafer inspection tools, turn to the experts at ClassOne Equipment. We proudly carry the full range of used KLA Surfscan Wafer Inspection tools.  While our inventory of KLA Surfscans does change, we usually have the KLA Surfscan range in stock, including the Surfscan 6200, 6220, 6400, 6420, SP1 TBI, and SP1 DLS.  We also provide service, maintenance, and spare parts support of Surfscan 6xxxSP1, and SP2 platforms.

Purchasing a used KLA Surfscan particle inspection system from ClassOne allows for savings up to 65% over buying a new system.  One of the main advantages is our attention to detail throughout our refurbishment process.  Our refurbishment process includes:

  • Replacement of the laser with a brand new laser.
  • Replacing the old power supply with a brand new power supply.
  • Full optics cleaning and alignment.
  • Full system calibration using NIST calibrated standard.
  • Any worn parts are replaced.
  • Several other mechanical assemblies are cleaned, lubricated, and fully tested.
  • See our YouTube Video for an overview of our refurbishment details: YouTube

As you review our inventory of used KLA Surfscan equipment, you will be able to see the configuration of each listed tool. In addition to the features of each used KLA Surfscan tool, you will also find a list showing each part that was restored to factory specifications.  Our commitment to full disclosure of the refurbishing process ensures that you know exactly what quality of used KLA Surfscan equipment you are purchasing.  Of course, all of our used KLA Surfscans come with a 30 day right of return, along with a 6 month warranty on parts and labor.  All our Surfscan models are eligible for an extended warranty and/or service contract.  We also always offer training and installation.

For more information on our list of available used KLA Surfscan equipment, please call +1-770-808-8708 or email our sales team at