KLA-Tencor Prometrix RS55/tc Four Point Probe Resistivity Mapping System
5064
Manufacturer:
KLA-Tencor
Model:
Prometrix RS55/tc
Max Wafer:
200mm
ID #:
5064
Configuration:
Four Point Probe, 200mm, Temp Compensation, Manual Wafer Handling, Contour Mapping, 3-D Plots