ClassOne Equipment is the premier supplier of high-quality, professionally-refurbished equipment for semiconductor, MEMS, LED, wireless, and many emerging technology markets. Our refurbished inventory includes a range of name-brand product lines such as Semitool™, SUSS Microtec™, EVG™, SPTS™, Oxford™, Plasmatherm™, KLA-Tencor™ and more.

And now we have added brand-new high-performance particle inspection systems from Takano.

ClassOne Equipment is able to deliver complete turn-key solutions that include refurbishment, 6- or 12-month warranty, installation by factory-trained technicians, and full support including spare parts and field service. Our engineers and technicians are deeply experienced and have held technical positions at Semitool, SUSS Microtec, EVG, SPTS, and KLA-Tencor. We operate from a 40,000 square foot facility in Atlanta, Georgia, that includes four refurbishment labs and Class 100 Cleanroom with the capacity to handle up to 35 systems at one time.


SEMITOOL Wet Process Equipment: ClassOne is the largest and most successful refurbisher of Semitool equipment in the world. We specialize in batch and single wafer process tools including the Semitool Spray Solvent Tool (SST), Spray Acid Tool (SAT), Spin Rinse Dryer (SRD), Equinox, LT210/Paragon, and Raider Electro-Chemical Plating Tool.


SUSS & EVG Mask Aligners & Bonders: ClassOne is the leading supplier of refurbished Suss & EVG mask aligners and wafer bonders with over 200 systems installed worldwide. We carry an extensive inventory which includes the Suss MJB3, MA6/BA6, MA8, MA150, MA200, and EVG 501, 520, 620, and 6200 systems.


SPTS, PLASMATHERM, & OXFORD Plasma Etchers: ClassOne offers full turn-key refurbished RIE, DRIE, and ICP plasma etchers as well as PECVD systems from SPTS, Plasmatherm, and Oxford Instruments.


KLA-TENCOR Wafer Inspection and Metrology Equipment: ClassOne is the world’s premier source for refurbished KLA-Tencor Wafer Inspection and Metrology Equipment. Expertise is in Surfscan 6xxx, SP1, AIT, and 21xx inspection tools. With a large inventory and a dedicated Class 100 cleanroom, we provide complete turn-key solution, including parts and service support.

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