×
Close
Call to Action
Usually a form goes here.
Call to Action
Login
Register
Cart
(
0
)
My RFQ
(
0
)
New Arrivals
Inquiry Form
Join Mailing List
My account
Contact Us
Refurbished
Process Equipment
Coaters/Developers
Mask Aligners & Bonders
Plasma Etchers & PECVD
Semitool Wet Process
Spin Rinse Dryers
As-Is Wet Benches
As-Is Process Equipment
Refurbished Metrology Equipment
Film Thickeness Measurement
Wafer Inspection
Surface Metrology
Other Metrology
As-Is Metrology Equipment
All New
Equipment
Takano WM-7SR Surface Particle Inspection System
Takano WM-10 Surface Particle Inspection System
ClassOne Technology New Wet Processing Equipment
Parts
EVG
KLA-Tencor
Other Parts
Semitool
Services
Suss
Takano
Company
About Us
About ClassOne Technology
Videos
Careers
Contact Us
Latest News
My account
My Profile
My Addresses
Order/RFQ History
All
All Parts
Equipment
Uncategorized
Search for:
SPTS PARTS
All Parts
>
Other Parts
> SPTS
SPTS
Showing 1–12 of 212 results
Featured
Default sorting
Sort by latest
A-Z
Z-A
SPTS | TR05277, 100.8mm Centering Ring
SS1387
OEM Part #:
TR05277
Description:
100.8mm Centering Ring
OEM Name:
SPTS
ID #:
SS1387
Condition:
New
View Details
Request For Quote
SPTS | TR04646, E-Chuck Flange, Ring
SS1386
OEM Part #:
TR04646
Description:
E-Chuck Flange, Ring
OEM Name:
SPTS
ID #:
SS1386
Condition:
New
View Details
Request For Quote
SPTS | TR04374, Centering Ring, 100mm
SS1385
OEM Part #:
TR04374
Description:
Centering Ring, 100mm
OEM Name:
SPTS
ID #:
SS1385
Condition:
New
View Details
Request For Quote
SPTS | TR04270A, Ceramic Ring
SS1383
OEM Part #:
TR04270A
Description:
Ceramic Ring
OEM Name:
SPTS
ID #:
SS1383
Condition:
New
View Details
Request For Quote
SPTS | Tube, Ceramic
SS1382
OEM Part #:
Description:
Tube, Ceramic
OEM Name:
SPTS
ID #:
SS1382
Condition:
New
View Details
Request For Quote
SPTS | TG00461, Ceramic Ring
SS1381
OEM Part #:
TG00461
Description:
Ceramic Ring
OEM Name:
SPTS
ID #:
SS1381
Condition:
New
View Details
Request For Quote
SPTS | N/A, Edge Protection Ring
SS1380
OEM Part #:
N/A
Description:
Edge Protection Ring
OEM Name:
SPTS
ID #:
SS1380
Condition:
New
View Details
Request For Quote
SPTS | N/A, Focus Ring
SS1379
OEM Part #:
N/A
Description:
Focus Ring
OEM Name:
SPTS
ID #:
SS1379
Condition:
New
View Details
Request For Quote
SPTS | M4 x 12 CSK Ali Vent Slot
SS1378
OEM Part #:
Description:
M4 x 12 CSK Ali Vent Slot
OEM Name:
SPTS
ID #:
SS1378
Condition:
New
View Details
Request For Quote
SPTS | DT323123.01, Inner Fixings Shield
SS1376
OEM Part #:
DT323123.01
Description:
Inner Fixings Shield
OEM Name:
SPTS
ID #:
SS1376
Condition:
New
View Details
Request For Quote
SPTS | KT326436.02, Central Core Seal Shield (Clamp Cover Kit)
SS1375
OEM Part #:
KT326436.02
Description:
Central Core Seal Shield (Clamp Cover Kit)
OEM Name:
SPTS
ID #:
SS1375
Condition:
New
View Details
Request For Quote
SPTS | FB327972, EPS Ring Assy — 150mm 57.5
SS1374
OEM Part #:
FB327972
Description:
EPS Ring Assy — 150mm 57.5
OEM Name:
SPTS
ID #:
SS1374
Condition:
New
View Details
Request For Quote
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
×