SPTS PARTS

Showing 193–204 of 212 results

• 

  SPTS | Window Clamp

  SS1087

  OEM Part #:

  NA

  Description:

  Window Clamp

  OEM Name:

  SPTS

  ID #:

  SS1087

  Condition:

  Tested

  View Details Request For Quote
• 

  SPTS | NS165-150, 6in Electro Static Chuck

  SS1086

  OEM Part #:

  NS165-150

  Description:

  6" Electro Static Chuck

  OEM Name:

  SPTS

  ID #:

  SS1086

  Condition:

  Tested

  View Details Request For Quote
• 

  SPTS | DT302261, ICP Ceramic Chamber

  SS1085

  OEM Part #:

  DT302261

  Description:

  ICP Ceramic Chamber

  OEM Name:

  SPTS

  ID #:

  SS1085

  Condition:

  New

  View Details Request For Quote
• 

  SPTS | 8in Ceramic Fingers

  SS1084

  OEM Part #:

  NA

  Description:

  8" Ceramic Fingers

  OEM Name:

  SPTS

  ID #:

  SS1084

  Condition:

  New

  View Details Request For Quote
• 

  SPTS | MACS Robot Arm Adapter

  SS1083

  OEM Part #:

  NA

  Description:

  MACS Robot Arm Adapter

  OEM Name:

  SPTS

  ID #:

  SS1083

  Condition:

  Tested

  View Details Request For Quote
• 

  SPTS | DT 30073A-01, Alumina End Effector

  SS1082

  OEM Part #:

  DT 30073A-01

  Description:

  Alumina End Effector

  OEM Name:

  SPTS

  ID #:

  SS1082

  Condition:

  New

  View Details Request For Quote
• 

  SPTS | 3502100024110, Drive Belt

  SS1081

  OEM Part #:

  3502100024110

  Description:

  Drive Belt

  OEM Name:

  SPTS

  ID #:

  SS1081

  Condition:

  New

  View Details Request For Quote
• 

  SPTS | PB303570.02, Gas Control Board for Remote Gas Box

  SS1080

  OEM Part #:

  PB303570.02

  Description:

  Gas Control Board for Remote Gas Box

  OEM Name:

  SPTS

  ID #:

  SS1080

  Condition:

  Used

  View Details Request For Quote
• 

  SPTS | MALS Wafer Centering Block

  SS1079

  OEM Part #:

  NA

  Description:

  MALS Wafer Centering Block

  OEM Name:

  SPTS

  ID #:

  SS1079

  Condition:

  Used

  View Details Request For Quote
• 

  SPTS | 1204-003420-001, 6in/150mm Ceramic Finger Assembly

  SS1077

  OEM Part #:

  1204-003420-001

  Description:

  6"/150mm Quadrant Clamp

  OEM Name:

  SPTS

  ID #:

  SS1077

  Condition:

  New

  View Details Request For Quote
• 

  SPTS | 1123680, Quadrant Clamp Support Ring

  SS1076

  OEM Part #:

  1123680

  Description:

  Quadrant Clamp Support Ring

  OEM Name:

  SPTS

  ID #:

  SS1076

  Condition:

  New

  View Details Request For Quote
• 

  SPTS | DT306872, 6in/150mm Center Shield

  SS1075

  OEM Part #:

  DT306872

  Description:

  6"/150mm Center Shield

  OEM Name:

  SPTS

  ID #:

  SS1075

  Condition:

  New

  View Details Request For Quote