Oxford Plasmalab 80 Plus PECVD System

Oxford Plasmalab 80 Plus PECVD System

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Plasmalab 80 Plus PECVD


Single Chamber PECVD, New PLC & PC2000 Software, up to 400C Platen



- Model: Plasmalab 80 Plus
- Single PECVD chamber, non load-locked
- Input Power: 208V, 3ph 
- Heated Platen up to 400 C
- Max Wafer Size 200mm
- PC2000 Software
- Black PLC
- Optional Upgrade Available: X20 PLC with PC4500 Software 
- Dual Frequency RF System
- RFX600A HF RF Generator
- Vacuum Pump & Blower (Fomblin Oil Prep)
- Optional Upgrade Availalble: Dry Pump
- Neslab RTE-111 Chiller
- Six Channel Gas Box Currently Equipped with Five MFCs: (CF4/O2, N2, N2O, NH3, SiH4/N2) 
- Operations Manual and Documentation


Excellent Condition Guaranteed. 
Fully Refurbished to Factory Specifications by ClassOne. 
6 Month Warranty and Full Specifications Guarantee. 
30 Day Right of Return. 

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped EXW from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM ET. There is an expedite fee for all rush orders requested. All international shipping are shipped EXW and import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.