KLA-Tencor Surfscan SP1 DLS – S/N 0904-0230

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KLA-Tencor Surfscan SP1 DLS – S/N 0904-0230

ID #:

3793
Manufacturer:

KLA-Tencor
Model:

SP1 DLS
Vintage:

2004
Max Wafer:

300mm
Configuration:

Configured for 300mm Wafers, Puck/Vacuum, Open Cassette or Dual FOUP/FIMS Handler

200mm/300mm, Puck/Vacuum, Open Cassette or FIM/FOUP Handler


ALTERNATIVELY, check out our BRAND NEW WM-10 Takano Surface Particle Inspection Systems:
https://classoneequipment.com/product/takano-wm-10-surfsace-particle-inspection-system/
 

SKU: 3793 Category:

DETAILS:

KLA-TENCOR SURFSCAN SP1 DLS UNPATTERNED SURFACE INSPECTION
SYSTEM consisting of:

- Model: SP1 DLS with 300mm Dual FOUP/FIMS Handler (other handlers available)
- Puck Handling
- Currently Configured for 300mm Wafers (cannot run 200mm wafers with this
handler configuration)
- Unpatterned Surface Inspection System
- Software Version 4.2
- 0.050um Defect Sensitivity on Polished Bare Silicon
- Enhanced Rough Film Sensitivity
- Argon Ion Laser (488nm)
- Defect Map and Histogram with Zoom
- RTDC (Real Time Defect Classification)
- Map to Map
- Operator Interface
- Microsoft Windows NT 4.0 Operating System
- Blower Unit
- 18” TFT Flat Panel Display

Includes Options:
   a) DIC/Brightfield
   b) NFS Client
   c) E84, E87, E39, E94
   d) SECs/GEM Communications
   e) Haze
   f) X-Y Coordinates

*ClassOne Equipment will use standard Polystrene Sphere (PSL) Test Wafers for Acceptance Testing. It is recommended that the Customer purchase one or multiple PSL Test Wafers for on-going Sensitivity Testing.*


KLA-TENCOR SURFSCAN SP1 REFURBISHMENT PROCESS consists of:

- Replace used Laser with New Laser
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
- Replace used Power Supply, as required
- Replacement or repair of any bad circuit board.
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.
- Optics assemblies cleaned and aligned to meet performance specifications or
replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced as
needed
- Puck assembly rebuilt or replaced (if applicable)
- Replace old monitor with Brand New LCD Monitor
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- Performance specifications returned to original factory specifications
- Machine is fully tested to verify compliance to OEM specifications
- System transport locks installed; system prepared for shipment

CONDITION:

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped EXW from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM ET. There is an expedite fee for all rush orders requested. All international shipping are shipped EXW and import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.