KLA Tencor Surfscan 6200 Surface Defect Inspection System

KLA Tencor Surfscan 6200 Surface Defect Inspection System

ID #:





Surfscan 6200



Max Wafer:


System Dimensions:


Weight: 695 lbs

200mm Wafers, New Laser, Optics Aligned, New Power Supply, Calibrated to OEM Specs



- Model: 6200 Surfscan
- Bare Wafer Surface Defect Inspection System
- Max Wafer Capable: 8”/200mm
- System configured for 8“/200mm wafers
- Defect Sensitivity: 0.12um
- Defect Map and Histogram with Zoom
- Haze Map and Histogram with Zoom
- Argon Ion Laser (488nm)
- 2D Signal Integration
- Software:
 + Microsoft Windows 98, Version 4.2
 + Software Enhancement
 + Computer Upgrade
- Pentium Computer
- Software Capable for Wafer Map and Histogram
- Parallel Printer Port
- Blower Box
- SECS II Communication Port
- Operations Manual and Documentation
- Power Supply will fit to the Customer Location
- One backup hard drive supplied to customer
- 6 Month Warranty on Parts and Labor (Laser warranty is 6 months
or 5000 hours whichever comes first, Puck is not covered under


- Replace used Laser with New Laser
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as
- Replace used Power Supply, as required
- Replacement or repair of any bad Circuit Board
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed
- Optics assemblies cleaned and aligned to meet performance specs or
replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced
as needed
- Puck assembly rebuilt or replaced (if applicable)
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- System transport locks installed; system prepared for shipment
- Refurbishment carried out by KLA-Tencor Trained Technicians
- Windows OS 

Note: If calibration wafers are required, please inform the size and type
needed, and they will be quoted separately


System is being sold As-Is / Where-Is. 

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped EXW from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM ET. There is an expedite fee for all rush orders requested. All international shipping are shipped EXW and import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.