KLA-Tencor SP1 TBI Unpatterned Surface Inspection System

KLA-Tencor SP1 TBI Unpatterned Surface Inspection System

ID #:








Max Wafer:



200mm/300mm, Puck/Vacuum, Open Cassette or FIM/FOUP Handler


- Model: SP1 TBI
- Up to 300mm Wafers
- Inquire about Handler Options for Various Size Wafers
- Unpatterned Surface Inspection System 
- Wafer Measurement Module
- Triple Beam Illumination (TBI)
- Normal Illumination- 0.079 Defect Sensitivity
- Oblique Illumination- 0.060 Defect Sensitivity
- 0.005 ppm Haze Sensitivity
- Ar Ion Laser (488 nm)
- RTDC (Real Time Defect Classification
- Measurement Chamber with ULPA filter and Blower Unit
- Operator Interface
- Microsoft Windows NT 4.0 Operating System
- Software Version 4.1
- Security, Logging and Native Networking as provided by Windows NT
- Interactive Pointing Device, Key Pad Controls
- TFT Flat Panel Display
- Parallel Printer Port
- Defect Map and Histogram with Zoom
- Micro View Measurement Capability
- Blower Box


- Replace used Laser with New Laser
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
- Replace used Power Supply, as required
- Replacement or repair of any bad circuit board.
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.
- Optics assemblies cleaned and aligned to meet performance specifications or replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced as needed
- Puck assembly rebuilt or replaced (if applicable)
- Replace old monitor with Brand New LCD Monitor
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- Performance specifications returned to original factory specifications
- Machine is fully tested to verify compliance to OEM specifications
- System transport locks installed; system prepared for shipment 


Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped EXW from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM ET. There is an expedite fee for all rush orders requested. All international shipping are shipped EXW and import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.