KLA-Tencor Prometrix UV-1280SE Thin Film Measurement System

KLA-Tencor Prometrix UV-1280SE Thin Film Measurement System

ID #:

4546

Manufacturer:

KLA-Tencor

Model:

UV-1280SE

Vintage:

N/A

Max Wafer:

200mm

System Dimensions:

58×37 1/4×66

Weight: 1093 lbs
Configuration:

150mm-200mm Wafers, Measures Film Thickness, Refractive Index and Extinction Coefficient

DETAILS:

KLA-TENCOR UV-1280SE THIN FILM MEASUREMENT SYSTEM consisting
of:
- Model: Prometrix UV-1280SE configured for 200mm Wafer Handling
- This price does not include applications (recipe and matching) support
- Measures Film Thickness, Refractive Index (RI) and Extinction Coefficient of
Single and Multi-Layer Thin Film Stacks Simultaneously without Referencing
- Reflectivity Range of 220 nm to 800 nm
- Intel Pentium Computer
- Operations Manuals Included
- Fully Refurbished to excellent condition

MEASUREMENT CAPABILITIES:
Single Layer Thickness (t):
- Thermal Oxide: 0 Å to 40 µm
- Oxynitride: 0 Å to 30 µm
- Nitride: 0 Å to 25 µm
- BPSG: 0 Å to 40 µm
- Photoresist: 0 Å to 40 µm
- Polyimide: 0 Å to 40 µm
- Poly on Oxide: 50 Å to 2 µm Poly on 40 Å to 4000 Å Oxide
- Poly on Nitride: 50 Å to 2 µm Poly on 40 Å to 4000 Å Nitride
- Amorphous Silicon: 50 Å to 2 µm Amorphous on 40 Å to 4000 Å Oxide or
Nitride
- Oxide on Poly: 50 Å to 1 µm Oxide on <500 Å Poly
- Nitride on Poly: 50 Å to 1 µm Nitride on <500 Å Poly
- TiN: 80 Å to 500 Å
- Oxide on Aluminum: <1000 Å to 25 µm
- Oxide on Tungsten: <1000 Å to 25 µm
Single Layer Refractive Index (N, k):
- Thermal Oxide: <100 Å
- Oxynitride: <100 Å
- Nitride: <100 Å
- BPSG: <500 Å
- Poly on Oxide: <100 Å
- Amorphous Silicon: <100 Å
- TiN: <200 Å

Simultaneous MultiLayer and Simultaneous MultiVariable Measurements:
- Up to 7 Unknowns in up to an 8 Layer Stac
ABSOLUTE ACCURACY:
Thickness:
±1.5 Å of NIST Certified Range for Oxide <125 Å:
±1 Å of NIST Certified Range for Oxide 125 Å to 300 Å
±1% of NIST Certified Range for Oxide
300 Å to 1.0 µm
Index:
±0.025 for >350 Å to 1.0 µm Oxide
±0.025 for >250 Å to 1.0 µm Nitride
STABILITY (3 SIGMA OF MEANS):
Oxide and Nitride Thickness:
- 20-100 Å 3 sigma <0.48 Å
- 100-300 Å 3 sigma <0.9 Å
- 200-2000 Å 3 sigma <0.3 Å
- 2000 Å-1.0 µm 3 sigma <0.1%
(Two Parameter Measurements)

CONDITION:

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM EST. There is a $100.00 USD charge for all rush orders requested. All international shipping import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.