Oxford Plasmalab 100 ICP

Plasma Etchers & PECVD
Model:
Oxford Plasmalab 100 ICP for sale
Price:
Request Price Quote     ID#:  4138
Picture:
200mm Platen, Load-Locked Single Chamber ICP, Chlorine Chemistry for Metal Etch Process
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Details:

OXFORD PLASMALAB 100 ICP ETCHER SYSTEM consisting of:


CONFIGURATION:
- Model: Plasmalab 100 ICP
- Inductive Coupled Plasma Source (ICP180)
- Max Wafer size: 6"/150mm
- Load-locked single chamber (ICP)
- Helium Backside Cooling (HBC)
- Turbo Pump ATH-900 turbo with controller
- Computer with Windows 7
- AE RFG3001 RF Generator (coil)
- AE RFX600 RF Generator (platen)
- LCD Monitor, Keyboard, and Mouse
- Load Lock Vacuum Pump
- Chamber Vacuum Pump
- Chiller
- Voltage: 415VAC 3 Phase 50/60Hz
- Operations Manual and Documentation
- Fully Refurbished


GAS POD IS 12 MFC CAPABLE. GAS CONFIGURATION CURRENTLY consisting of:
1) SF6
2) O2
3) Ar
4) BCI3
5) CI2
6) CH4
7) H2



CLASSONE REFURBISHMENT PROCESS FOR OXFORD RIE AND ICP ETCHERS consisting of:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- System components carefully packed, labeled, and professionally crated.

Condition:

Excellent Condition Guaranteed.
6 Month Warranty.
30 Day Right of Return.


Delivery:

12-14 weeks

Price:
      ID#:  4138