Tepla 600 Semi-Automatic Plasma Asher

Tepla 600 Semi-Automatic Plasma Asher

ID #:





600 Plasma Asher



System Dimensions:

29 1/8x31x72


150mm Wafer Capable, 245mm Diameter Chamber, 600W RF Power Generator


TEPLA 600 PLASMA ASHER consisting of:
- Model: 600 SemiAuto
- Semi-Automatic RF Plasma System 
- Can process up to 150mm wafers
- Used for photoresist stripping and surface cleaning, as well as etching silicon and its compounds
- Chamber Size: 245mm diameter, 380mm depth
- Chamber Material: ceramic
- ENI RF Generator: 0-600 Watt, 13.56 MHz
- Gases: 4 channels controlled by 4 MFCs 
- MFCs: 3 Brooks 5850 MFCs (professional rebuilt and calibrated)
- MFCs: 1 UNIT UFC-8101 MFCs (professional rebuilt and calibrated)
- Computer: on-board, single card computer
- RS232 interface
- Software: up to 100 programs of 5 steps each can be entered
- Emergency Stop (EMO)
- Leybold D65B Vacuum Pump or equivalent (professionally rebuilt)
- Quartz 4" 25 slot cassette
- Quartz 6" 25 slot cassette
- Dimensions: 740mm x 624mm x 701mm + connections
- Weight: 135 kg (approximate)
- Electrical: 230V, 50/60Hz, 15A, 2kW
- Manufactured in 2003.
- System Refurbishment Includes: New Quartz Chamber, New Magnetron, All Consumables (O-Rings, Seals) Replaced, MFCs Rebuilt and Calibrated, Vacuum Pump Rebuilt, and more. 
The Tepla 600 Semi-Auto Plasma System is used for the following processes among others:
- Photoresist stripping
- Surface cleaning after storage
- Surface cleaning after processes using oil pump or diffusion pump vacuum
- Surface cleaning as part of photolithography after wet developing
- Stripping of photoresist layers after etching
- Removal of organic passivating layers and masks
- Etching of glass and ceramic
- Etching of SiO2, Si3N4, Si
- Removal of polyimide layers.


Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

See ClassOne's Computer Upgrade Below!

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped EXW from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM ET. There is an expedite fee for all rush orders requested. All international shipping are shipped EXW and import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.