Suss MA6/BA6 Mask Aligner – S/N 233

Suss MA6/BA6 Mask Aligner – S/N 233

ID #:





MA6/BA6 Mask Aligner



Max Wafer:



Topside & Backside Alignment, 350W Lamphouse, UV400 Optics

SKU: 4440 Category:


SUSS MA6/BA6 MASK ALIGNER consisting of:

- Model: MA6
- Manufacturer: Suss MicroTec / Karl Suss
- Wafer Size: up to 6"/150mm Wafers (with proper chuck)
- Topside and Backside Alignment (TSA & BSA)
- Suss DVM6 Splitfield Microscope
- Objectives: 5x, 10x & 25x (2 sets)
- UV400 Optics (for 365nm and 405nm exposure)
- CIC1200 Power Supply
- Capable of Hard, Soft, Vacuum, and Proximity Contact
- 1000W Lamphouse
- Vibration Isolation Table (for Suss MA6)
- 1 Vacuum Chuck included (select from available sizes)
- 1 Maskholder included (select from available sizes)
- System Power: 230V, 50/60 Hz
- Operations Manual for Suss MA6 Mask Aligner
- Fully Refurbished by Suss factory trained technicians


ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM EST. There is a $100.00 USD charge for all rush orders requested. All international shipping import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.