Suss MA6 / BA6 Mask Aligner

Suss MA6 / BA6 Mask Aligner

ID #:





MA6 Mask Aligner



Max Wafer:



Topside Alignment, Backside Alignment, 500W Lamphouse, UV400 Optics


SUSS MA6 / BA6 MASK ALIGNER consisting of:

- Model: MA6 / BA6
- Manufacturer: Suss MicroTec / Karl Suss
- Wafer Size: Small Pieces up to 6”/150mm Diameter Wafers
- Topside (TSA) Alignment
- Backside (BSA) Alignment
- Suss DVM6 Microscope
- Objectives:
- UV400 Optics (for 365nm and 405nm exposure)
- CIC 500 Power Supply
- Capable of Hard, Soft, Vacuum Contact  with proper tooling.
- 350W Lamphouse
- Customer using Soft, Hard, and Vacuum Contacts
- Vibration Isolation Table (for Suss MA6)
- One Chuck included
- One Maskholder included
- System Power: 230V, 50/60 Hz
- Operations Manual for Suss MA6 Mask Aligner
- Fully Refurbished by Suss factory trained technicians


1) Main System Body:
- Ellipsoidal Mirror Replaced with New
- UV Bulb Replaced with New
- Cold Light Mirror Inspected & Replaced as Needed
- Front Turning Mirror Inspected & Replaced as Needed
- Front Lens Inspected & Replaced as Needed
- Shutter Cylinders Replaced with New
- Mirror House Cylinder Replaced with New
- Lamp Power Supply Tested & Repaired or Replaced as Needed
- Exposure Optics Tested
- Microscope Illumination Bulbs Replaced with New
- Microscope Assembly Inspected and Adjusted as Needed
- Full Optical Alignment of Microscope Performed as Needed
- Machine is Fully Tested to Verify Compliance to Original Specifications
- WEC Head Rebuilt
- Pneumatic Regulators Inspected & Replaced as Needed
- Machine Covers are Repainted or Replaced as Needed

2) Isolation Table:
- Isolation Table Air Bags Inspected & Replaced as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Air lines Inspected & Replaced as Needed
- Wheels Inspected & Replaced as Needed
- Leveling Feet Inspected & Replaced as Needed


Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications. 
6 Month Warranty and Specifications Guarantee
30 Day Right of Return.
Available for full inspection and demonstration at our facility in Atlanta, GA.  
We offer Installation & Training on all our used and refurbished Karl Suss Mask Aligners (the full line of Suss Mask Aligners including the Suss MJB3, MA6, MA150, and MA200). 

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped EXW from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM ET. There is an expedite fee for all rush orders requested. All international shipping are shipped EXW and import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.