Suss M6000L Lift Off System
Suss M6000L Lift Off System
M6000L Lift Off System
4" Wafers, Fully Automated, Single Wafer System, for metal Lift-Off process, Chemical Delivery Unit
SUSS M6000L LIFT OFF SYSTEM consisting of:
- Manufacturer: Suss MicroTec
- Model: M6000L
- Process: Lift-Off (resist and metal)
- Currently set for 4" Wafers
- Wafer Size capable: 3" up to 6" diameter
- Cassette to Cassette handling
- Lift-Off Process Chamber (Module)
- High Pressure dispense arm for dispensing recirculated NMP
- Fan jet nozzle for dispensing fresh NMP
- N2 backside rinse
- Stainless Steel filters
- Pneumatically controlled centering jaws
- Drive via indirect AC servo motor
- Send/Receive Module
- System Robot
- Rinse Module (DI water rinse wafers above and below)
- DI Water rinse via puddle nozzle
- 2-Tanks (1 for fresh, 1 for used NMP)
- Chemical Delivery Cabinet
- Power Supply
- Emergency Off (EMO)
- 2 Chillers
- Vintage: 2002
The Suss M6000L is designed for Lift-Off applications (e.g. removal of resist and metal from wafers). The lift-off process is carried out with heated and cold NMP medium followed by rinsing with DI water in a separated rinsing station. Fresh medium is dispensed via a fan spray nozzle at the upper section of the chamber; recirculated NMP medium is despensed by a high-pressue (thermo-controlled) and/or fan spray nozzles (thermo-controlled).
ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.
All orders are shipped from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM EST. There is a $100.00 USD charge for all rush orders requested. All international shipping import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.
ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.
This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.
Please have your Sales Order number or Invoice number available to expedite the return process.
Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).
Returned items must meet ClassOne Equipment inspection standards for credit to be issued.