Lab SPTS MPX ASE-HRM ICP PRO Etcher System

Lab SPTS MPX ASE-HRM ICP PRO Etcher System

ID #:

4342

Manufacturer:

SPTS

Model:

MPX ASE-HRM ICP PRO Etcher

Vintage:

2003

Max Wafer:

200mm

Configuration:

200mm, Deep Silicon Etch (Bosch Process), High Rate Magnetic Chamber

SKU: 4342 Category:

DETAILS:

SPTS MPX ASE-HRM ICP PRO ETCHER consisting of:

Configuration:
- Model: MPX ICP PRO
- Process Chamber: ASE-HRM
- ASE-HRM chamber: High Rate Magnetic source achieves over three times the etch rates versus the original Bosch process
- Process: High Rate Deep Silicon Etch
- Operating software: Windows  
- Max wafer size capable: 200mm
- Voltage: 208V 60Hz 3Ph

Vacuum Load-lock For Single Chamber MPX systems (MESC):
- Carousel Load Lock (200mm)
- Chamber lid temperature control
- Fully automatic transfer of substrates between the load-lock and the process chamber

MPX ICP Process Chamber:
- Production proven single wafer process chamber  
- Balun Coil for High Rate Etch
- Turbo Pump
- VAT Pendulum Valve
- Backside Helium Cooling
- Remote sealed extracted gas box with orbitally welded gas lines
- Electronics cabinet  
- LCD flat panel monitor
- Fully automatic multistep processing or manual operation
- High Frequency RF Generator
- Low Frequency RF Generator
- Vacuum Pump (Load Lock)
- Vacuum Pump (Chamber)
- Chiller
- System Cables (full set)

- Operations Manuals
- Refurbished to excellent condition by SPTS factory trained technicians.

CONDITION:

Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne. 
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.  

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM EST. There is a $100.00 USD charge for all rush orders requested. All international shipping import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.