Semitool 1-Chamber Spray Acid Tool (SAT)

Semitool 1-Chamber Spray Acid Tool (SAT)

ID #:





Spray Acid Tool (1-chamber)



Max Wafer:



1-Chamber SAT


- Model: SAT-2080SCBU
- Spray Acid Tool (SAT)
- Single Chamber
- Up to 6"/150mm Capable
- Capacity: Single 25-Wafer Cassette, 150mm wafers
- 2 Heated Chemical Tanks 
- 2 Pneumatic Trebor Magnum 610 Pumps for chemical delivery
- 1 Hot DI Water Loop
- Heated N2 Delivery
- Capable of bulk fill hook-up (external)
- 3 Fill Vessels
- 3 AO Metering Pumps
- 2 Bottle Fill Connections 
- Emergency Off (EMO)
- System Power: 208V, 3PH, 40Amp, 50/60Hz
- Refurbished by former Semitool factory trained technicians 


- All subassemblies disassembled, cleaned, serviced, reassembled, tested
- All solenoid valves replaced with brand new
- All nozzles replaced with brand new
- Door Seal replaced with brand new
- All supply lines cleaned or replaced with new
- All seals cleaned or replaced with new
- All filters replaced with new 
- Rotor Stop Positioners tested and replaced as necessary
- Window replaced with new (as necessary) 
- Start/Stop Switches replaced with new, as necessary
- Blanket Heaters replaced with new, as necessary
- Nitrogen Pressure Sensors replaced as necessary. 
- Bowl inspected and sent to be electropolished 
- Any worn or damaged parts are repaired or replaced 
- Machine covers replaced as needed 
- All work performed by former Semitool factory trained technicians
- Machine is fully tested to verify compliance to specifications 
- System de-installed following Semitool factory procedures 
- System transport locks installed; system prepared for shipment 
- System packed: all components carefully packed and labeled


Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM EST. There is a $100.00 USD charge for all rush orders requested. All international shipping import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.