Oxford Plasmalab 100 PECVD System

Oxford Plasmalab 100 PECVD System

ID #:





Plasmalab 100 PECVD



Max Wafer:



8" Wafer Capable, 400C substrate table, Load Locked Chamber


OXFORD PLASMALAB 100 PECVD consisting of:
- Model: Plasmalab 100 PECVD
- Process: SiO2 and SiN deposition
- Max Wafer Size Capable: 8"/200mm
- Single wafer process up to 8-inch wafer
- Load Locked Chamber
- 600W RF Generator
- Substrate Electrode: 205mm
- Shower Head Gas Inlet Optimised for PECVD
- 400° C Substrate Table
- System Computer
- System Chiller 
- Alcatel 2033 Vacuum Pump (Loadlock Pump) 
- Alcatel 2033 Vacuum Pump & RSV301B Blower (Chamber Pump)
- Oxford PC2000 Software
- Windows XP Operating Software (OS)
- Operations Manuals for Plasmalab 100 PECVD  
- Manufactured in 2008!
- Serial number: 94-814892 
- CE Certified
- Gas cabinet setup with 7 gases as follows: 
1. CF4/O2                 500sccm       MKS 1179  viton seals
2. N2                         2SLM            MKS 1179  viton seals
3. N2O                      1SLM             MKS 1179  viton seals
4. HE                        2SLM             MKS 1179  viton seals
5. SiH4                     50sccm          MKS 1479  metal seals
6. PH3/AR                50sccm          MKS 1479  metal seals
7. B2H6/AR              50sccm          MKS  1479 metal seals


Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM EST. There is a $100.00 USD charge for all rush orders requested. All international shipping import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.