KLA-Tencor Surfscan 6420 Defect Inspection System

KLA-Tencor Surfscan 6420 Defect Inspection System

ID #:





Surfscan 6420



Max Wafer:


System Dimensions:

30 x 41 x 66

Weight: 726 lbs

New Laser, New Power Supply, Calibrated to OEM Specifications, Up to 8"/200mm Wafer Capable

ALTERNATIVELY, check out our BRAND NEW WM-7SR Takano Surface Particle Inspection Systems:




- Model: Surfscan 6420

- Bare wafer surface defect inspection system

- Substrate/Sizes: 2", 3", 4", 6" and 8" Wafer Capable

- Substrate Thickness: Adjustable up to 12 mm.

- Material: any surface that scatters less than 90% of incident light

- Cassette Handling: Single puck handling from single cassette or platform.

- Defect Sensitivity: Most Surfaces: Better than 0.12 um (depending upon surface quality).

- Defect Sensitivity: Polished Silicon: Better than 0.12 um at 95% capture rate.

- Illumination Source: 30 mW Argon-Ion laser, 488 nm wavelength

- Operating Software: Windows 98 Operating Software

- Operations Manual and Documentation

- Refurbished to Factory Specifications (see below for full details)

- System calibrated to OEM specifications

- 6 Month Warranty on Parts and Labor (Laser warranty is 12 months or 5000

hours whichever comes first. Puck is not covered under warranty)


Note: Calibration wafers are required for continued calibration of the system. If required, these can be quoted additionally.


- Replace used Laser with New Laser

- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required 

- Replace used Power Supply, as required 

- Replacement or repair of any bad circuit board.

- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.

- Optics assemblies cleaned and aligned to meet performance specs or replaced as needed

- Electronic assemblies tested to meet performance specifications or replaced as needed

- Puck assembly rebuilt or replaced (if applicable)

- Calibrate system using calibration wafers 

- Machine covers are cleaned, polished, or replaced, as needed 

- System transport locks installed; system prepared for shipment 

- Refurbishment carried out by KLA-Tencor Trained Technicians

- Intel Pentium Processor and Windows OS 98 SE Upgrade

- Video of KLA 6XXX refurbished by ClassOne: http://www.youtube.com/watch?v=2qu9bnHPYLg


Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped EXW from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM ET. There is an expedite fee for all rush orders requested. All international shipping are shipped EXW and import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.