KLA-Tencor Surfscan 6400 Defect Inspection System

KLA-Tencor Surfscan 6400 Defect Inspection System

ID #:





Surfscan 6400


New Laser, New Power Supply, Calibrated to OEM Specifications, Up to 8"/200mm Wafer Capable

ALTERNATIVELY, check out our BRAND NEW WM-7SR Takano Surface Particle Inspection Systems:


consisting of:

- Model: Surfscan 6400
- Bare Wafer Surface Defect Inspection System
- System can handle up to 200mm capable
- Cassette Handling: Single puck handling from single cassette or platform
- Substrate Thickness:  Automatic adjustment within 2 mm range
- Material: Any surface that scatters less than 90% of incident light
- Defect Sensitivity:
     - Most Surfaces: Better than 0.20 um (depending upon surface quality)
     - Polished Silicon: Better than 0.15 um at 95% capture rate
- Repeatability Error: Count repeatability error less than 1.5% at 1 standard deviation (Mean count greater than 500 for 0.364-um diameter latex spheres on bare silicon)
- Count Accuracy: Better than 99% as verified with VLSI Standards
- Relative Standard Spatial Resolution: 50 um spacing, minimum
- Dynamic Range: 0.1 um to 100 um in a single measurement
- Throughput:
     - Up to 120 wafers per hour using 150 mm wafers
     - Up to 95 wafers per hour using 200 mm wafers
- Contamination: Less than 0.5 particles/cm squared greater than 0.20 um diameter per single pass
- Illumination Source: 
     - 30 mW Argon-Ion laser
     - 488 nm wavelength
- Operations Manual and Documentation
- Power: 208V, 1PH, 17A, 60Hz


Excellent Condition Guaranteed. 
6 Month Warranty and Full Specifications Guarantee.

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped EXW from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM ET. There is an expedite fee for all rush orders requested. All international shipping are shipped EXW and import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.