KLA-Tencor Surfscan 6220 Defect Inspection System

KLA-Tencor Surfscan 6220 Defect Inspection System

ID #:





Surfscan 6220



Max Wafer:


System Dimensions:


Weight: 695 lbs

New Laser, New Power Supply, Calibrated to OEM Specifications, Up to 8"/200mm Wafer Capable

ALTERNATIVELY, check out our BRAND NEW WM-7SR Takano Surface Particle Inspection Systems: https://classoneequipment.com/product/takano-wm-7sr-surfsace-particle-inspection-system/


- Model: Surfscan 6220
- Automatic Surface Inspection System
- Bare Wafer Surface Defect Inspection System
- Substrate/Sizes: 2", 3", 4", 6" and 8" Wafer Capable
- Thickness: SEMI Standard Wafer Thickness
- Material: Any Opaque, Polished Surface which Scatters less than 5 percent of Incident Light
- Defect Sensitivity: 0.09 Micrometer Diameter PSL Sphere Equivalent with greater than 80 percent Capture Rate (0.112um @ 90%)
- Repeatability: Count Repeatability Error less than 0.5 percent at 1 Standard Deviation (Mean Count greater than 500, 0.364 mm dia. Latex Spheres)
- Accuracy: Count Accuracy better than 99 percent (verified with VLSI Standards’ Relative Standard)
- Throughput: 100 wph (200 mm) at 0.12 mm
- Contamination: Less than 0.005 Particles/cm2 greater than 0.15 mm dia. per single pass
- Cassette Handling: Single Puck Wafer Handling from two Cassettes (one Sender/Receiver, one Receiver)
- Illumination Source: 30 mW Argon-Ion laser, 488 nm Wavelength
- Operator Interface: Mouse and/or Dedicated User Keypad
- Operations Manual and Documentation
- 6 Month Warranty on Parts and Labor (Laser warranty is 12 months or 5000 hours whichever comes first, Puck is not covered under warranty)



- Replace used Laser with New Laser

- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required 

- Replace used Power Supply, as required 

- Replacement or repair of any bad circuit board.

- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.

- Optics assemblies cleaned and aligned to meet performance specs or replaced as needed

- Electronic assemblies tested to meet performance specifications or replaced as needed

- Puck assembly rebuilt or replaced (if applicable)

- Calibrate system using calibration wafers 

- Machine covers are cleaned, polished, or replaced, as needed 

- System transport locks installed; system prepared for shipment 

- Refurbishment carried out by KLA-Tencor Trained Technicians

- Intel Pentium Processor and Windows OS 98 SE Upgrade

- Video of KLA 6XXX refurbished by ClassOne: http://www.youtube.com/watch?v=2qu9bnHPYLg


Excellent Condition Guaranteed. 
6 Month Warranty and Full Specifications Guarantee. 
30 Day Right of Return.


ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped EXW from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM ET. There is an expedite fee for all rush orders requested. All international shipping are shipped EXW and import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.