KLA-Tencor RS75 Four Point Probe System

KLA-Tencor RS75 Four Point Probe System

ID #:





Prometrix RS75

Max Wafer:



Four Point Probe, Automated, Temperature Compensation, Up to 200mm, 3-D Plots, Contour Mapping


- Model: RS-75
- Four Point Probe System
- Up to 200 mm wafers
- One second per site overall measurement speed
- A 49-site contour map with temperature compensation can be achieved on a manually loaded test wafer in less than sixty seconds.
- Provides precise sheet resistance measurements for monitor wafers, with significantly improved speed over existing systems.
- Ideal for a wide range of semiconductor process monitoring applications such as ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP and bulk silicon.
- Displays include contour maps, 3-D plots, and
diameter scans
- Refurbished to Excellent Condition.
- Operator Manual for Prometrix RS75 System.
Also in Stock: KLA-Tencor Prometrix RS55 Four Point Probe Systems! 


Excellent Condition Guaranteed.
3 Month Warranty.
30 Day Right of Return.

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped EXW from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM ET. There is an expedite fee for all rush orders requested. All international shipping are shipped EXW and import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.