KLA-Tencor ASET F5x Thin Film Measurement System

KLA-Tencor ASET F5x Thin Film Measurement System

ID #:








Max Wafer:



150/200/300mm Wafer Capable, Dual Beam Spectrometry, Spectroscopic Elipsometer


Consisting of:

- Model: ASET F5x
- Configured for 200mm wafers with Dual Cassette Open Handler
- 150mm wafer handling is available (please inquire)
- 300mm wafer handling is available with handler change (please inquire)
- Spectroscopic Ellipsometer
- Xenon Light Source with 220nm to 800nm Wavelength Range (1 Xenon Lamp)
- Three User Selectable DBS Spot Sizes: 2.7, 10, 40 um
- Pattern Recognition (KLA F5x)
- Windows XP Operating System
- 1.25 GHz Pentium Computer
- 80GB SCSI Hard Drive 
- DVD/RW Drive
- 1 Gb DRAM
- Flat Panel LCD Display
- KLA F5x Keyboard and Trackball
- Ethernet PCIA Card
- Multi-Layer Film Capacity
- Micro Spot Optics
- Scanning Stage (KLA F5x)
- Wafer Mapping
- In-Situ Capability
- Controller Type: PC/VME
- Operator Manual for KLA F5x

- Replace Xenon Lamp with New
- Replace Lamp Window Glass Cover with New
- Replace Paraboloid Assembly with New
- Replace Keyboard and Trackball Mouse with New
- Replaced Polarizer, as required
- Replace Power Supply, as required
- Replacement or repair of any bad circuit board
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.
- Refurbish Robot: replace all belts, refurbish ball splines and lead screw, new
bearings, replace motors if needed, check vacuum switch and valve and replace if
needed, new vacuum lines, replace flip-flop assy, check boards, lubrication,
repeatabily and orthogonality test.
- Optics assemblies cleaned and aligned to meet performance specifications or
replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced as
- Replace old monitor with Brand New LCD Monitor
- Perform stage calibrations
- Perform handler calibrations
- Run DBS and SE calibrations
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- Performance specifications returned to original factory specifications
- Machine is fully tested over consecutive days to verify compliance to OEM
- System locked for transport following proper procedures


Excellent Condition Guaranteed.
Fully Refurbished by ClassOne.
6 Month Warranty 
30 Day Right of Return.

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped EXW from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM ET. There is an expedite fee for all rush orders requested. All international shipping are shipped EXW and import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.