KLA-Tencor 5200XP Overlay Registration System

KLA-Tencor 5200XP Overlay Registration System

ID #:





5200XP Overlay Registration System



Max Wafer:


System Dimensions:


Weight: 695 lbs



- Model: 5200XP
- Overlay Registration(stepper alignment) and Critical Dimension (CD) Measurement System
- 8"/200mm Wafer Capable System
- Fully Automated Non-Contact Box-In-Box Measurement for Overlay Registration (stepper alignment). The Overlay Registration specification is 4nm per KLA’s published spec sheet
- Fully Automated Non-Contact CD Measurement and we recommend it to be used for CD’s the size of 1.5um or above
- Uses Proven Coherence Probe Microscopy (CPM) Technology
- Lowers Stepper Cost of Ownership. Includes KLASS (KLA Stepper Set-up Software) which allows the calculation of critical parameters for overlay control on lithography tools
- Measures all Layers, including Low-Contrast or Grainy Targets
- Operations Manual for KLA-Tencor 5200XP Overlay Registration System
- Refurbished to Meet Published KLA-Tencor 5200XP Specifications
- We can include installation, training, and warranty


Excellent Condition Guaranteed. 
6 Month Warranty and Full Specifications Guarantee. 
30 Day Right of Return.

As-Is / Where-Is Pricing is Also Available.  

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped EXW from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM ET. There is an expedite fee for all rush orders requested. All international shipping are shipped EXW and import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.