EVG Gemini Automated Production Wafer Bonding System

EVG Gemini Automated Production Wafer Bonding System

ID #:








Max Wafer:



4 Bonding Chambers, 10 kN Pressure Bonding Capability, Up To 550°C



-    Fully automated operation
-    Interlocked doors with signal light tower
-    4 Axis Industrial Robot
-    EVG CIM Framework Software GUI (Graphical User Interface)
-    Flexible process flow definition
-    Drag and drop recipe programming
-    Parallel processing of multiple jobs
-    Automated recording of process and machine parameters
-    Throughput optimized handling sequence
-    Password protected user access levels
-    Open cassette loading with empty/present sensor
-    Currently configured for 6" (150mm) wafers (4" and 8" optional with additional hardware)
-    Qty 8 bond chucks included for 6" wafers, additional chucks can be offered
-    SmartView®NT Alignment Module with 5x Objectives
-    4 Bond modules with up to 550°C and 10kN bond force
-    Formic Acid Bubbler option for purging formic acid vapor into bond chamber
-    1 purge gas line for process gas
-    CE Certified
-    System documentation
-    Vintage 2015


Operational in fab.  System is being sold as-is.

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM EST. There is a $100.00 USD charge for all rush orders requested. All international shipping import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.