EVG 620 TBR Mask Aligner System

EVG 620 TBR Mask Aligner System

ID #:

4385

Manufacturer:

EVG

Model:

620TBR Mask Aligner

Vintage:

2002

Max Wafer:

150mm

Configuration:

Topside Alignment, 150mm Wafers, Automatic Alignment, Like-New!

SKU: 4385 Category:

DETAILS:

EVG 620 MASK ALIGNER SYSTEM consisting of:
 
- Model: EVG 620TBR
- Automated Mask Aligner
- Topside Alignment (TSA)
- Bottomside Alignment (BSA)
- Automatic Alignment
- 3 Cassette Station Ergo Load Cassette Station
- Cassette to Cassette Handling (can also be operated in manual mode)
- Up to 6"/150mm Wafer Capable (with proper chuck)
- 10x Objectives (Qty 4)
- Vacuum Chuck: To Be Determined at Time of Order
- Maskholder: To Be Determined at Time of Order
- Can be Operated in Proximity, Soft Contact, Hard Contact or Vacuum Contact Exposure Modes (with proper tooling)
- Tooling Exchanges are Quick, Simple and can be Performed Within Minutes
- Exposure Optics: Type C, 350nm - 450nm, Broadband
- Lamphouse: 500W Lamphouse
- Motorized Alignment Stage (X, Y, Theta Directions) to the 3-Axis Joystick
- Microsoft Windows based User Interface
- System PC, Keyboard, Cables
- Operations Manual for EVG 620
- Vintage: 2002



CLASSONE'S MASK ALIGNER REFURBISHMENT PROCESS consists of: 

1) Main System Body:
- Ellipsoidal Mirror Replaced with New
- UV Lamp Replaced with New
- Cold Light Mirror Inspected & Replaced as Needed
- Front Turning Mirror Inspected & Replaced as Needed
- Front Lens Inspected & Replaced as Needed
- Lamp Power Supply Tested & Repaired or Replaced as Needed 
- Exposure Optics Tested 
- Microscope Assembly Inspected and Adjusted as Needed
- Full Optical Alignment of Microscope Performed as Needed
- Machine is Fully Tested to Verify Compliance to Original Specifications
- WEC Head Rebuilt as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Machine Covers are Repainted or Replaced as Needed

2) Isolation Table:
- Isolation Table Air Bags Inspected & Replaced as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Air lines Inspected & Replaced as Needed
- Wheels Inspected & Replaced as Needed 
- Leveling Feet Inspected & Replaced as Needed




INSTALLATION AND SUPPORT WORLDWIDE OF EVG MASK ALIGNERS:

- ClassOne Supports all its Used and Refurbished EVG Mask Aligners with Spare Parts and Service Worldwide
- Installation & Training Available Worldwide
- Learn more: http://www.classoneequipment.com/content/mask-aligners

CONDITION:

Excellent Condition Guaranteed. 
Fully Refurbished to Factory Specifications by ClassOne. 
6 Month Warranty and Full Specifications Guarantee. 
30 Day Right of Return.

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM EST. There is a $100.00 USD charge for all rush orders requested. All international shipping import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.