EVG 120 Automated Coater / Developer Processing System

EVG 120 Automated Coater / Developer Processing System

ID #:





120 Automated Coater / Developer Processing System



Max Wafer:



8"/200mm, Spin Coating Station, Developer Station, Bake & Chill Modules



- Model: EVG120
- Automated Resist Processing Station
- 2 Spin Stations: Coat Station & Develop Station
- Bake, Chill & Vapor Prime Modules
- Send/Receive Cassette Station with Ergo Load Mounts
- Cassette to Cassette Handling
- Up to 8"/200mm Wafer Capable
- Resist and Solvent Level Sensing System with Software Display for Resist Filling Level

- Station 1: Spin Coating Station
•    PTFE Spin Chamber
•    Programmable Drive Unit for up to 10,000 RPM
•    Programmable Dispense Arm for Centre, Edge, and Area Dispense
•    For use with 2 Different Resist Lines
•    Bowl Wash Cover included
•    2x Cybor Pump
•    1x Top Side Edge Bead Removal (EBR) System for Spin Coating
•    1x Backside Rinse (BSR) for Spin Coating
•    Spinner Chuck: request at time of order

- Station 2: Developer Module
•    PTFE Spin Chamber
•    Programmable Drive Unit for up to 4,000 RPM
•    2x Dispense Nozzle for Spray Develop & Puddle Develop
•    1x DI Water Dispense
•    1x Backside Rinse
•    Spinner Chuck: request at time of order

- 4x Bake Modules (up to +150C)
- 1x Bake Module for HMDS Vapor Priming (up to +150C)
- 2x Chill Modules, CDA Cooled
- 1x Chemical Cabinet
- Microsoft Windows based User Interface
- System PC, Keyboard, Cables
- Operations Manual
- Manufactured in 2002
- Sold with 6 Month Warranty!


Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

As-Is / Where-Is Pricing is Also Available. 

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped EXW from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM ET. There is an expedite fee for all rush orders requested. All international shipping are shipped EXW and import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.