EVG 150 Automated Coater / Developer Processing System

EVG 150 Automated Coater / Developer Processing System

ID #:





150 Automated Coater / Developer Processing System



Max Wafer:



8"/200mm, Spin Station, Coating Station, Developer Station, 6 Bake & 2 Chill Modules



- Model: EVG150
- Automated Resist Processing Station
- 3 Spin Modules: Bake, Chill & Vapor Prime
- Send/Receive Cassette Station with Ergo Load Mounts
- Cassette to Cassette Handling
- Currently Configured for 4"/100mm & 6"/150mm Wafers
- Up to 8"/200mm Wafer Capable
- Resist and Solvent Level Sensing System with Software Display for Resist Filling Level

- Station 1: Spin Coating Station
•    PTFE Spin Chamber
•    Programmable Drive Unit for up to 10,000 RPM
•    Programmable Dispense Arm for Centre, Edge, and Area Dispense
•    For use with 4 Different Resist Lines
•    Drain Tank with Filling Level Sensor underneath Coat Module
•    Bowl Wash Cover included
•    Spinner Chuck: request at time of order
•    2x Standard Resist Pump Dispense Systems for Dispense Coating
•    1x IDI Model 600 High Viscosity Pump for Spin Coating
•    1x Syringe Dispense System for Spin Coating
•    1x Top Side Edge Bead Removal (EBR) System for Spin Coating
•    1x Backside Rinse (BSR) for Spin Coating

- Station 2: Spray Coating Station
•    PTFE Coating Chamber
•    Programmable Rotational Speed of Substrate
•    Spray Unit consisting of Atomizer and Spray Nozzle for Independent Opeartion
•    Integrated Solvent Lines for Spray Unit Wash
•    Drain Tank with Filling Level Sensor underneath Coat Module
•    Bowl Wash Cover Included
•    Spinner Chuck: request at time of order
•    1x Syringe Dispense System for Spray Coating
•    1x Exhaust Flow Controller Box
•    1x Top Side Edge Bead Removal (EBR) System for Spray Coating
•    1x Backside Rinse (BSR) for Spray Coating
•    1x 5 Gallon Bowl Wash Tank
•    2x Liquid Primer Dispense System
•    1x Pressurized Tank for Primer

- Station 3: Developer Module
•    PTFE Spin Chamber
•    Programmable Drive Unit for up to 4,000 RPM
•    1x Dispense Nozzle for Spray Develop, Puddle Develop, DI Water Stream Line
•    1x Additional Develop Dispense System
•    1x Nitrogen Dry Nozzle
•    1x Backside Rinse
•    1x Bypass DI Water System
•    Spinner Chuck: request at time of order

- 2x Bake Modules (up to +150C)
- 2x High Temperature Bake Modules (up to +250C)
- 1x High Temperature Bake Module (up to +350C)
- 1x Bake Module for HMDS Vapor Priming (up to +150C)
- 2x Chill Modules, CDA Cooled
-1x Chemical Cabinet for up to 8 Chemicals
- Microsoft Windows based User Interface
- System PC, Keyboard, Cables
- Operations Manual for EVG150
- Manufactured in 2010
- Sold with 6 Month Warranty!


Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM EST. There is a $100.00 USD charge for all rush orders requested. All international shipping import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.