EVG 120 Automated Coater Processing System

EVG 120 Automated Coater Processing System

ID #:





120 Automated Coater Procesing System



Max Wafer:



EVG 120 Automated Coater Processing System

SKU: 4433 Category:



- Model: EVG120
- Automated Resist Processing Station
- 1 Wet Processing Module (can handle up to two wet process modules)
- Send/Receive Cassette Station with Ergo Load Mounts
- Cassette to Cassette Handling
- Currently Configured for 6”/150mm Round Wafers
- Up to 8”/200mm Wafer Capable
- Resist and Solvent Level Sensing System with Software Display for Resist Filling Level
- CAN Bus Controller with Windows-based Operating System

- OmniSpray Coat Module
• PTFE Coating Chamber
• In x- / y-plane programmable nozzle movement
• Integrated solvent lines for spray unit wash (if solvent tank is equipped)
• Programmable drive unit for up to 1000 rpm (maximum rpm in process is dependent of actual configuration and substrate parameters)
• Spray Coating Atomizer - Focus Spray Nozzle
• Spinner Chuck for Spray Coating 150mm
• 1 Syringe Dispense System
• 1 Spray Coat Resist Dispense System
• 1 Programmable Exhaust Controller

- Bake Chill Module
• 1 Bake Plate 150C
• 1 Chill Plate, Water Cooled
• 1 Bake Plate for HMDS Vapor Priming - Chemicals
• 1 Chemistry Cabinet for up to two Chemicals
• 1 Vapor Prime Supply Unit

- System PC, Keyboard, Cables
- Operations Manual for EVG120
- Manufactured in 2018


Never Used - Brand New in Original Crates! 

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM EST. There is a $100.00 USD charge for all rush orders requested. All international shipping import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or support@ClassOneEquipment.com.

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.