AG Associates Heatpulse 4100 RTP System

AG Associates Heatpulse 4100 RTP System

ID #:



AG Associates




AG Associates Heatpulse 4100 RTP System

SKU: 4527 Category:



- Model: 4100 RTP System
- Wafer handling: automatic serial processing, using standard cassettes.
- Throughput: Process dependent, approximately 80 wafers / hour (in a null cycle) without flat-finder.
- Wafer sizes: 3 inches, 4 inches, 5 inches, 6 inches (standard).
 - Ramp-up rate: Programmable, 1 – 180°C per second.
 - Steady-state duration: 1 – 600 seconds per step.
- Ramp-down rate: Programmable, 1 – 180°C per second. Ramp-down rate is temperature and radiation dependent, maximum 150°C per second.
- Recommended steady-state temperature range: 400 – 1200°C.
 - ERP temperature accuracy: +5°C to -9°C, when calibrated against an instrumented thermocouple wafer (ITC).
- Temperature repeatability: + 7°C or better at 1150°C wafer to wafer. (Repetition specifications are based on a 100-wafer set.)
- Temperature uniformity: + 10°C across an 6-inch wafer at 1150°C. (This is a 1-sigma deviation from 100-angstrom oxide uniformity.) For a titanium silicidation process, no more than 1.5 percent increase to uniformity during the first anneal at 650 – 700°C.


This system is being sold AS-IS. 

ClassOne Equipment will ship via FedEx, UPS, DHL and/or your desired shipping company. For larger items we will ship via one of our partnered shipping companies who are experienced with handling sensitive semiconductor manufacturing equipment.

All orders are shipped from Atlanta, Georgia USA. Availability and lead-times are based on current conditions and are subject to change depending on in-house demand at time of ordering. We estimate the shipping and delivery dates based on the availability of your parts as well as the shipping options you have chosen. Rush orders will ship the same-day that they are received, if received by 2:30 PM EST. There is a $100.00 USD charge for all rush orders requested. All international shipping import duties and taxes are the responsibility of the purchaser. ClassOne Equipment charges sales tax for items shipped to CA, GA, MI, TX, and MT.

ClassOne Equipment warrants all non-consumable parts for 90 days (unless otherwise stated). This warranty commences upon documented delivery.

This warranty does not apply to defects caused by negligence, improper installation, misuse, unauthorized repair, accident or alteration by the purchaser, or damage during shipping. This warranty does not cover consumable parts. No other warranty is made, expressed or implied, statutory or otherwise.

For all return information and authorization (including RMA #), please contact ClassOne Equipment at +1-770-808-8708 or

Please have your Sales Order number or Invoice number available to expedite the return process.

Please note the following important information: (a) all returns must include all original, undamaged items in their original packaging; (b) all items must be in the same condition as received; (c) shipping and handling fees are non-refundable; (d) purchaser is responsible for all return shipping costs (including international shipping import/export duties and taxes).

Returned items must meet ClassOne Equipment inspection standards for credit to be issued.