EVG 120 Automated Coater Procesing System

Mask Aligners & Bonders
Model:
EVG 120 Automated Coater Procesing System for sale
Price:
Request Price Quote     ID#:  4433
Picture:
EVG 120 Automated Coater Processing System
Details:

EVG 120 AUTOMATED COATER PROCESSING SYSTEM consisting of:

- Model: EVG120
- Automated Resist Processing Station
- 1 Wet Processing Module (can handle up to two wet process modules)
- Send/Receive Cassette Station with Ergo Load Mounts
- Cassette to Cassette Handling
- Currently Configured for 6”/150mm Round Wafers
- Up to 8”/200mm Wafer Capable
- Resist and Solvent Level Sensing System with Software Display for Resist Filling Level
- CAN Bus Controller with Windows-based Operating System

- OmniSpray Coat Module
• PTFE Coating Chamber
• In x- / y-plane programmable nozzle movement
• Integrated solvent lines for spray unit wash (if solvent tank is equipped)
• Programmable drive unit for up to 1000 rpm (maximum rpm in process is dependent of actual configuration and substrate parameters)
• Spray Coating Atomizer - Focus Spray Nozzle
• Spinner Chuck for Spray Coating 150mm
• 1 Syringe Dispense System
• 1 Spray Coat Resist Dispense System
• 1 Programmable Exhaust Controller

- Bake Chill Module
• 1 Bake Plate 150C
• 1 Chill Plate, Water Cooled
• 1 Bake Plate for HMDS Vapor Priming - Chemicals
• 1 Chemistry Cabinet for up to two Chemicals
• 1 Vapor Prime Supply Unit

- System PC, Keyboard, Cables
- Operations Manual for EVG120
- Manufactured in 2018
- SYSTEM NEVER USED - BRAND NEW IN ORIGINAL CRATES!

Condition:

Never Used - Brand New in Original Crates!


Delivery:

1 week

Price:
      ID#:  4433