SPTS, Plasmatherm, & Oxford Instruments

SPTS, Plasmatherm, & Oxford Instruments

ClassOne Equipment is the industry expert for refurbished plasma etch (RIE, DRIE, ICP) and deposition (PECVD) equipment from top manufacturers SPTS, Plasmatherm, and Oxford Instruments. Our factory trained technicians provide a complete turn-key solution from a fully refurbished system meeting original specifications to installation and training at your facility with after-sales service and parts support. We back our systems with an industry-leading 6-month warranty and a 30-day return policy. Buying refurbished equipment can save you up to 65% off OEM prices while providing the same exceptional quality and performance you demand.

SPTS:  Our core expertise is in SPTS Multiplex ICP (DRIE, ASE, AOE, etc), Pegasus ICP (DRIE), MPX ICP platforms , and PECVD systems.  

Oxford Instruments:  Our focus and expertise is in the Oxford Plasmalab 80 Plus, Plasmalab 100 Plus, Plasmalab 133 Plus, and Plasmalab 800 Plus RIE, ICP, and PECVD systems.

Plasmatherm: Our focus and expertise is in the Plasmatherm 790 RIE, SLR-720 RIE, SLR-730 PECVD, SLR-770 ICP (DRIE), and other Plasmatherm systems.

• Service Calls
• Quarterly PMs
• Save up to 50% on service!


ClassOne supports all refurbished SPTS, Plasmatherm, and Oxford systems with spare parts and service.  Contact us for more info.

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