SPTS Omega fxP Rapier Deep Silicon Etch System

Plasma Etchers & PECVD
Model:
SPTS Omega fxP Rapier Deep Silicon Etch System for sale
Price:
Request Price Quote     ID#:  4220
Picture:
200mm Capable, Multi-Chamber Capable, Optical End Point System
photo
Click an image to view full size.
Details:

SPTS OMEGA fxP RAPIER DEEP SILICON ETCH SYSTEM Consisting of:

- Model: Omega fxP Plasma Etch System
- fxP Wafer Transport Module
- One DSi Rapier Process Module
- This is a multi-chamber system and more chambers can be added
- Capable of up to 200mm wafers

Standard System Features:
- 4-color Alarm Tower
- Windows based control software
- Bracket-mounted high resolution colour TFT monitor with keyboard
- Thru Wall panel
- PC104 control architecture
- Devicenet control of module pendulum valve, MFCs, pneumatics, fore-line Convectron, thermocouples
- 10 m free cable to electronics rack
- Electronics cabinet
- CE compliant
- SEMI –S2 compliant
- Two sets of system manuals on CD
- Rear control station

fxP Transport Module:
- 8 port wafer transport module
- Brooks MagnaTran 7 series robot
- Two fixed vacuum cassettes
- Dynamic Wafer Aligner
- Windows based control software

DSi Rapier Process Module
- Bosch process deep Si module
- Rapier Plasma Source
- Module envelope contains all process control hardware
- PC104 control unit
- AE Apex RF generator (Primary source)
- AE Apex RF generator (Secondary source)
- AE Apex RF generator (bias) – HF
- AE Apex RF generator (bias) - LF
- RF Bias match
- Top power fixed match
- DC coil supply
- Heated VAT pendulum valve
- Electro-static chuck, PSU & He back-pressure control
- Heated lower chamber, DSi upper chamber & foreline
- Extracted surface mount gas boxes (1x Primary, 1 x Secondary)
- Alcatel ATH2300MT turbo pump
- Automated He flow endpoint
- Turbo by-pass for module roughing
- Chamber capacitance manometer (1.0 torr)
- Foreline mini-capacitance manometer
- Wafer edge protection ring
- Perfluoroelastomer seals

Option Included:
- Claritas Optical Endpoint System

Ancillary Equipment:
1. Re-circulating chiller (Bettatech CU700) – Chills platen
2. ADIXEN ADP122LM
3. ADIXEN ADS602H
4. Delatech Exhaust Gas Scrubber
5. Thermo Flex 24000 Neslab Chiller – Chills pumps and tool

Condition:

As-Is, Where-Is


Delivery:

2-4 weeks

Price:
      ID#:  4220