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Service and Support for KLA-Tencor AIT systems

ClassOne Equipment Class 100 Cleanroom
ClassOne Equipment Class 100 Cleanroom

ClassOne Equipment provides service and maintenance solutions for an extensive range of KLA-Tencor AIT systems. We provide a full suite of services including; laser replacement, decommission, installation, and preventative maintenance services.

ClassOne Equipment provides service and maintenance on the following KLA AIT® systems:

  • AIT I
  • AIT II
  • AIT XP
  • AIT XP+
  • AIT UV
  • AIT UV+
  • AIT UV++   

Some of the major service options offered include:

  • Laser Replacement and alignment (Visible and UV)       
  • Mercury Image Computer Diagnostics and Service
  • Sustaining support, training, and /or service contracts
  • Provide a Bank of Hours option to minimize tool down time
  • Corrective Maintenance and/ or Preventative Maintenance contracts
  • De-installation and tool moves with equipment lockdowns
  • Installation Qualification, and Warranty Service
  • Refurbishment and /or Reconfiguration of AIT® System

ClassOne Equipment also offer service and maintenance on KLA SP1 Classic, SP1 TBI, and SP1 DLS wafer inspection equipment.  For more information on our KLA AIT and SP1 service solutions please contact us!