Semitool Equinox Electroplating System

Semitool Wet Process
Model:
Semitool Equinox Electroplating System for sale
Price:
Request Price Quote     ID#:  4350
Picture:
4 Plating Chambers, 2 Preclean SRD chambers, 1 Plating Tank
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Details:

SEMITOOL EQUINOX PLATING SYSTEM consisting of:

- Model: Equinox
- Configured for 150mm Wafers
- 4 Plating Chambers
- 2 Preclean / SRD Chambers
- Genmark Radial Robot
- 1 Tank Ultrasonic Level Sensor
- ARU Interface
- Levitronix Pumps
- Surpass Flow Meters
- Pall 10” Filter Housings (Plating Cells)
- Pall 4” Filter (Prewet Tank)
- Sample Port
- Fire Suppression System
- Chemical Bulk Fill
- Dynatronix Pro Series Plating Power Supply (4-Cell)
- Tank Heat Exchange Connections
- Power: 208VAC, 80A, 50/60Hz
- Fully refurbished by Semitool trained technicians
- Available for full inspection at ClassOne in Atlanta, Georgia.

REFURBISHMENT PROCESS FOR SEMITOOL EQUINOX SYSTEMS consists of:

- All CDA/N2 pneumatic lines inspected and replaced as needed
- All chambers removed, inspected for damage, repaired/ or replaced (as needed)
- All delivery valves inspected, tested, and replaced as needed
- All drain/ return valves inspected, tested, replaced as needed
- All Lift/ Rotates removed for complete rebuild
- All nozzles inspected and replaced as needed
- All PFA tubing inspected, cleaned, or replaced as needed
- All wiring completely inspected and replaced as needed
- Automation set up and cycled for testing wafer handling
- Dynatronix plating supply tested with dummy loads and repaired as needed
- Flow meters inspected and replaced as needed
- New Anodes
- New N2 filters installed
- New O-Rings installed in filter housings
- Plating pumps removed, inspected, cleaned / or rebuilt as needed
- Prealigner tested and replaced as needed
- Indexer tested and refurbished as needed
- Full cycle/ testing


Condition:

Being purchased to part out - Alex''s department Was originally purchased as a parts tool for Alex, but then converted to a sellable system in NS on 8/31/17 and converted ID from XT1104 to 4350 Fair to good – needs cleaning. Used for Plating COPPER.


Delivery:
Price:
      ID#:  4350              
 

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