SPTS Primaxx Monarch 3 HF Etcher

Plasma Etchers & PECVD
Model:
SPTS Primaxx Monarch 3 HF Etcher for sale
Price:
Request Price Quote     ID#:  4085
Picture:
HF Vapor Etcher, currently 6"/150mm, capable of 200mm, Semi-Automatic 3-wafer loader with Load Lock.
photo
photo
Click an image to view full size.
Details:

SPTS PRIMAXX MONARCH 3 HF VAPOR ETCHER consisting of:


- Model: Primaxx Monarch 3
- Process: HF Vapor Etcher
- For Anhydrous HF Gas Etching of Oxide
- Currently Configured for 6”/150mm Wafers
- Capable of processing up to 8”/200mm Wafers
- Semi-Automatic 3-Wafer Loader with Load Lock
- Single Process Chamber
- Integrated Panel PC with on-board electronics minimizes cleanroom footprint
- Third generation Primaxx process chamber has been designed for easy wafer size
changed and maintenance
- Vacuum Pumps (as required)
- Primaxx Manuals & Documentation
- Vintage: 2010

Condition:

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
3 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.


Delivery:

8-12 weeks

Price:
      ID#:  4085