Oxford Plasmalab 80 Plus RIE

Plasma Etchers & PECVD
Model:
Oxford Plasmalab 80 Plus RIE for sale
Price:
Request Price Quote     ID#:  4311
Picture:
Single Chamber RIE, non-load locked, 200mm platen
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Details:

OXFORD PLASMALAB 80 PLUS RIE ETCHER consisting of:

- Model: Plasmalab 80 Plus RIE
- Single Chamber RIE, non-load locked
- Ideal for R&D reactive ion etch applications
- Platen: 200mm diameter
- Windows 7 PC ($25,000 upgrade included)
- Upgraded PLC with latest Software
- 300W Advanced Energy Hilight 133 RF Generator
- Edwards QDP80 Vacuum Pump & 250 Blower (professionally rebuilt)
- System Chiller (professionally rebuilt)
- System Dimensions: 23"x40"x59" (LxWxH)
- Operations Manual and Documentation
- Fully Refurbished to excellent condition (see below details)


GAS CONFIGURATION:
Gas 1:
Gas 2:
Gas 3:
Additional 3 gases (up to 6 total) can be added at later date at cost.


REFURBISHMENT PROCESS FOR OXFORD PLASMALAB 80 PLUS RIE consisting of:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.

Condition:

Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne. 
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.


Delivery:

8-12 weeks

Price:
      ID#:  4311