Oxford Plasmalab 133 ICP

Plasma Etchers & PECVD
Model:
Oxford Plasmalab 133 ICP for sale
Price:
Request Price Quote     ID#:  4180
Picture:
Load-Locked Single Chamber, 380mm electrode, Chlorine Chemistry!
photo
photo
photo
Click an image to view full size.
Details:

OXFORD PLASMALAB 133 ICP 380 ETCHER consisting of:

- Model: Plasmalab 133 ICP
- Inductive Coupled Plasma Source (ICP380)
- Load-locked single chamber (ICP)
- Electrode: 380mm
- Alcatel ATH1300M Maglev Turbo Pump
- Alcatel Adixen ACT 1300M Controller
-Advanced Energy RF Power Generator
- Computer with PC2000
- LCD Monitor, Keyboard, and Mouse
- Alcatel Adixen ADP 122 P Vacuum Pump
- Alcatel CP 40G Vacuum Pump
- Chiller
- EMO Button
- Operations Manual and Documentation
- Offered as Fully Refurbished and meeting Original Specifications.

GAS POD CONFIGURED WITH 6 MFCS consisting of:
1) BCL3 @ 50 SCCM
2) CL2 @ 50 SCCM
3) CH4 @ 100 SCCM
4) O2 @ 200 SCCM
5) AR @ 100 SCCM
6) H2 @ 50 SCCM


REFURBISHED TO MEET OEM SPECIFICATIONS consisting of:

- Chamber disassembled for refurbishment
- Chamber received full wet clean
- Chamber o-rings and seals are replaced with brand new
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally
- All corrosive gas lines replaced with brand new
- All Non-corrosive gas lines cleaned
- Vacuum pumps professionally rebuilt
- Turbo pump professionally rebuilt
- Chillers serviced and fully tested
- All wiring/wire harnesses are checked, repaired or replaced if needed
- All liquid and air lines, tubing and fittings checked and replaced if necessary
- Major components disassembled for checkout, servicing, cleaning, and lubricating - parts are repaired or replaced as needed
- Checkout of all electronic and mechanical parts
- Machine covers are cleaned, polished or replaced as needed
- Equipment is fully tested to verify compliance to specifications
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer
- System cycle and repeatability testing completed prior to cover replacement and wipe down
- System components carefully packed, labeled, and professionally crated

Condition:

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.


Delivery:

10-12 weeks

Price:
      ID#:  4180