KLA-Tencor UV-1280SE

Film Thickness Measurement
Model:
KLA-Tencor UV-1280SE for sale
Price:
Request Price Quote     ID#:  4066
Picture:
150mm-200mm Wafers, Measures Film Thickness, Refractive Index and Extinction Coefficient
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Details:

KLA-TENCOR UV-1280SE THIN FILM MEASUREMENT SYSTEM consisting
of:

- Model: Prometrix UV-1280SE
- Up to 200mm handling
- Measures Film Thickness, Refractive Index (RI) and Extinction Coefficient of
Single and Multi-Layer Thin Film Stacks Simultaneously without Referencing
- Reflectivity Range of 220 nm to 800 nm
- Intel Pentium Computer
- Operations Manuals Included
- Fully Refurbished to Excellent Condition


MEASUREMENT CAPABILITIES:

Single Layer Thickness (t):
- Thermal Oxide: 0 Å to 40 µm
- Oxynitride: 0 Å to 30 µm
- Nitride: 0 Å to 25 µm
- BPSG: 0 Å to 40 µm
- Photoresist: 0 Å to 40 µm
- Polyimide: 0 Å to 40 µm
- Poly on Oxide: 50 Å to 2 µm Poly on 40 Å to 4000 Å Oxide
- Poly on Nitride: 50 Å to 2 µm Poly on 40 Å to 4000 Å Nitride
- Amorphous Silicon: 50 Å to 2 µm Amorphous on 40 Å to 4000 Å Oxide or
Nitride
- Oxide on Poly: 50 Å to 1 µm Oxide on <500 Å Poly
- Nitride on Poly: 50 Å to 1 µm Nitride on <500 Å Poly
- TiN: 80 Å to 500 Å
- Oxide on Aluminum: <1000 Å to 25 µm
- Oxide on Tungsten: <1000 Å to 25 µm
Single Layer Refractive Index (N, k):
- Thermal Oxide: <100 Å
- Oxynitride: <100 Å
- Nitride: <100 Å
- BPSG: <500 Å
- Poly on Oxide: <100 Å
- Amorphous Silicon: <100 Å
- TiN: <200 Å
Simultaneous MultiLayer and Simultaneous MultiVariable Measurements:
- Up to 7 Unknowns in up to an 8 Layer Stac


ABSOLUTE ACCURACY:

Thickness:
±1.5 Å of NIST Certified Range for Oxide <125 Å:
±1 Å of NIST Certified Range for Oxide 125 Å to 300 Å
±1% of NIST Certified Range for Oxide
300 Å to 1.0 µm
Index:
±0.025 for >350 Å to 1.0 µm Oxide
±0.025 for >250 Å to 1.0 µm Nitride


STABILITY (3 SIGMA OF MEANS):

Oxide and Nitride Thickness:
- 20-100 Å 3 sigma <0.48 Å
- 100-300 Å 3 sigma <0.9 Å
- 200-2000 Å 3 sigma <0.3 Å
- 2000 Å-1.0 µm 3 sigma <0.1%
(Two Parameter Measurements)

Condition:

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.


Delivery:

10-12 weeks

Price:
      ID#:  4066