KLA-Tencor Surfscan 6220

Wafer Inspection
Model:
KLA-Tencor Surfscan 6220 for sale
Price:
Request Price Quote     ID#:  4340
Picture:
New Laser, New Power Supply, Calibrated to OEM Specifications, Up to 8"/200mm Wafer Capable
photo
photo
photo
Click an image to view full size.
Details:

KLA-TENCOR SURFSCAN 6220 SURFACE DEFECT INSPECTION SYSTEM consisting of:

- Model: Surfscan 6220
- Automatic Surface Inspection System
- Bare Wafer Surface Defect Inspection System
- Set up for: Left Side 4"/6" wafers. Right Side 2"/3" wafers.
- Thickness: SEMI Standard Wafer Thickness
- Material: Any Opaque, Polished Surface which Scatters less than 5 percent of Incident Light
- Defect Sensitivity: 0.09 Micrometer Diameter PSL Sphere Equivalent with greater than 80 percent Capture Rate (0.112um @ 90%)
- Repeatability: Count Repeatability Error less than 0.5 percent at 1 Standard Deviation (Mean Count greater than 500, 0.364 mm dia. Latex Spheres)
- Accuracy: Count Accuracy better than 99 percent (verified with VLSI Standards’ Relative Standard)
- Throughput: 100 wph (200 mm) at 0.12 mm
- Contamination: Less than 0.005 Particles/cm2 greater than 0.15 mm dia. per single pass
- Cassette Handling: Single Puck Wafer Handling from two Cassettes (one Sender/Receiver, one Receiver)
- Illumination Source: 30 mW Argon-Ion laser, 488 nm Wavelength
- Operator Interface: Mouse and/or Dedicated User Keypad
- Operations Manual and Documentation
- Power Supply will fit to the Customer Location
- 12 Month Warranty on Parts and Labor (Laser warranty is 12 months or 5000 hours whichever comes first, Puck is not covered under warranty)

KLA-TENCOR SURFSCAN 6220 REFURBISHMENT PROCESS consists of:


- Replace used Laser with New Laser

- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required

- Replace used Power Supply, as required

- Replacement or repair of any bad circuit board.

- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.

- Optics assemblies cleaned and aligned to meet performance specs or replaced as needed

- Electronic assemblies tested to meet performance specifications or replaced as needed

- Puck assembly rebuilt or replaced (if applicable)

- Calibrate system using calibration wafers

- Machine covers are cleaned, polished, or replaced, as needed

- System transport locks installed; system prepared for shipment

- Refurbishment carried out by KLA-Tencor Trained Technicians

- Intel Pentium Processor and Windows OS 98 SE Upgrade

- Video of KLA 6XXX refurbished by ClassOne: http://www.youtube.com/watch?v=2qu9bnHPYLg

Condition:

Excellent Condition Guaranteed.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.


Delivery:

6-8 weeks

Price:
      ID#:  4340