KLA-Tencor SP2

Wafer Inspection
Model:
KLA-Tencor SP2 for sale
Price:
Request Price Quote     ID#:  3978
Picture:
300mm FOUP/FIM, 2012 Vintage
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Details:

KLA-TENCOR SP2 UNPATTERNED SURFACE INSPECTION SYSTEM consisting of:

- Model: SP2
- Unpatterned Surface Inspection System
- Dual FIM/FOUP, Vacuum Puck Handling
- Configured for 300mm Wafers
- Unpatterned Surface Inspection System
- Wafer Measurement Module
- Optimized sensitivity and Throughput < 37 nm Defect Sensitivity on Polished Bare Silicon
- Enables Qualification of Current and Next Generation Substrates, SOI, Strained SOI and Strained Si
- Qualification and Monitoring of Process Tools at 90, 65 and 45 nm Technology Nodes
- UV Laser Illumination
- Defect Map and Histogram with Zoom
- iMicroview Measurement Capability
- SURFimage
- Real-Time Defect Classification (RTDC)
- Can be Upgraded to SP2 XP at Additional Cost
- Microsoft XP Operating System
- CE Compliant and Certified
- Blower Box
- Operations Manual for KLA-Tencor SP2
- Vintage 2012

Condition:

AS-IS Condition.
Excellent Condition Guaranteed.



Delivery:

2-4 weeks

Price:
      ID#:  3978