KLA-Tencor SP1 TBI

Surface Metrology
Model:
KLA-Tencor SP1 TBI for sale
Price:
Request Price Quote     ID#:  4309
Picture:
200mm/300mm, Puck/Vacuum, Single Open Handler
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Details:

KLA-TENCOR SP1 TBI SURFACE INSPECTION SYSTEM consisting of:

- Model: SP1 TBI
- Dual Open Cassette Handler
- Wafer Size: 200mm wafers
- Wafer Material: Silicon
- Unpatterned Surface Inspection System
- Wafer Measurement Module
- Triple Beam Illumination (TBI)
- Normal Illumination- 0.079 Defect Sensitivity
- Oblique Illumination- 0.060 Defect Sensitivity
- 0.005 ppm Haze Sensitivity
- Ar Ion Laser (488 nm)
- RTDC (Real Time Defect Classification)
- File Output Format KLARF
- Measurement Chamber with ULPA filter and Blower Unit
- Operator Interface
- Microsoft Windows NT 4.0 Operating System
- Software Version 4.1
- Security, Logging and Native Networking as provided by Windows NT
- Interactive Pointing Device, Key Pad Controls
- TFT Flat Panel Display
- Parallel Printer Port
- Defect Map and Histogram with Zoom
- XY Coordinates
- Micro View Measurement Capability
- Blower Box
- Refurbished to Specifications
- Operations Manual for KLA-Tencor SP1 TBI
- GEM/SECS (Host Control) capable
- HSMS
- GEM/SECS and HSMS Manual
- Ethernet Capable
- Facilities / Operations Manual
- 12 Month Warranty on Parts and Labor (Laser warranty is 12 months or 5000 hours, whichever comes first. Puck(s) not covered under warranty)
- ClassOne Equipment will use standard Polystrene Sphere (PSL) test wafers for acceptance testing. It is recommended that the customer purchase one or multiple PSL test wafers for on-going sensitivity testing.

Condition:

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
























Out Of Stock Behavior - Default -




Delivery:

8-10 weeks

Price:
      ID#:  4309