KLA-Tencor SP1 TBI

Wafer Inspection
Model:
KLA-Tencor SP1 TBI for sale
Price:
Request Price Quote     ID#:  3934
Picture:
200mm/300mm, Puck/Vacuum, Open Cassette or FIM/FOUP Handler
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Details:

KLA-TENCOR SP1 TBI UNPATTERNED SURFACE INSPECTION SYSTEM consisting of:

- Model: SP1 TBI
- Puck/Vacuum Handling
- Unpatterned Surface Inspection System
- Wafer Measurement Module
- Triple Beam Illumination (TBI)
- Normal Illumination- 0.079 Defect Sensitivity
- Oblique Illumination- 0.060 Defect Sensitivity
- 0.005 ppm Haze Sensitivity
- Ar Ion Laser (488 nm)
- Measurement Chamber with ULPA filter and Blower Unit
- Operator Interface
- Microsoft Windows NT 4.0 Operating System
- Security, Logging and Native Networking as provided by Windows NT
- Interactive Pointing Device, Key Pad Controls
- Parallel Printer Port
- Defect Map and Histogram with Zoom
- Micro View Measurement Capability
- Blower Box for SP1 TBI
- Operations Manual for KLA SP1 TBI

- ClassOne Equipment will use standard Polystrene Sphere (PSL) test wafers for acceptance testing. It is recommended that the customer purchase one or multiple PSL test wafers for on-going senstivity testing.

KLA-TENCOR SURFSCAN SP1 REFURBISHMENT PROCESS consists of:

- Replace used Laser with New Laser
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
- Replace used Power Supply, as required
- Replacement or repair of any bad circuit board
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed
- Optics assemblies cleaned and aligned to meet performance specifications or replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced as needed
- Puck assembly rebuilt or replaced (if applicable)
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- System transport locks installed; system prepared for shipment

Condition:

Excellent Condition Guaranteed.
6 Month Warranty.


Delivery:

8-10 weeks

Price:
      ID#:  3934