KLA-Tencor Prometrix RS75/a

Surface Metrology
Model:
KLA-Tencor Prometrix RS75/a for sale
Price:
Request Price Quote     ID#:  4086
Picture:
Four Point Probe, Automated, Up to 200mm, 3-D Plots, Contour Mapping
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Details:

KLA-TENCOR PROMETRIX RS75/a FOUR POINT PROBE SYSTEM consisting of:

- Model: RS-75 / A
- Four Point Probe System
- Automated Cassette to Cassette handling
- Up to 200 mm wafers
- Provides throughput of over 100 wafers per hour when conducting a five-site test
- One second per site overall measurement speed
- A 49-site contour map can be achieved on a manually loaded test wafer in less than sixty seconds.
- Provides precise sheet resistance measurements for monitor wafers, with significantly improved speed over existing systems.
- Ideal for a wide range of semiconductor process monitoring applications such as ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP and bulk silicon.
- Displays include contour maps, 3-D plots, and
diameter scans
- Refurbished and Calibrated to meet Original Specifications (NIST Traceable)
- Operator Manual for Prometrix RS75 System.


Also in Stock: KLA-Tencor Prometrix RS55/a Four Point Probe Systems!
The only differences between a RS55 and RS75 is that a RS75 has faster throughput (100wph), it uses a notch/flat alignment technique compared to a RS55 that uses a prealigner, and it has a bigger disk drive.

Condition:

Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications
3 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.


Delivery:

4-6 weeks

Price:
      ID#:  4086