KLA-Tencor ASET F5x

Film Thickness Measurement
Model:
KLA-Tencor ASET F5x for sale
Price:
Request Price Quote     ID#:  4227
Picture:
150/200/300mm Wafer Capable, Dual Beam Spectrometry, Spectroscopic Elipsometer
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Details:

KLA-TENCOR ASET F5x THIN FILM MEASUREMENT SYSTEM WITH SWE OPTION consisting of:

- Model: ASET F5x
- Configured for 200mm wafers with Dual Cassette Open Handler
- 150mm wafer handling is available (please inquire)
- 300mm wafer handling is available with handler change (please inquire)
- Spectroscopic Ellipsometer
- Xenon Light Source with 220nm to 800nm Wavelength Range (1 Xenon Lamp)
- Three User Selectable DBS Spot Sizes: 2.7, 10, 40 um
- Pattern Recognition (KLA F5x)
- MMX Computer
- 9.1GB SCSI Hard Drive and 3.5” Floppy Disk Drive
- 128 Mb DRAM
- Color VGA Monitor
- KLA F5x Keyboard and Trackball
- Windows Operating System
- 2.0 GB Random Access SCSI Jazz back-up drive (1 cartridge)
- Ethernet PCIA Card
- Multi-Layer Film Capacity
- Micro Spot Optics
- Scanning Stage (KLA F5x)
- Wafer Mapping
- In-Situ Capability
- Controller Type: PC/VME
- Operator Manual for KLA F5x

REFURBISHMENT PROCESS FOR KLA-TENCOR F5X consists of:

- Replace Xenon Lamp with New
- Replace Lamp Window Glass Cover with New
- Replace Paraboloid Assembly with New
- Replace Keyboard and Trackball Mouse with New
- Fully Test Jazz Drive, replace as required
- Replaced Polarizer, as required
- Replace Power Supply, as required
- Replacement or repair of any bad circuit board
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.
- Refurbish Robot: replace all belts, refurbish ball splines and lead screw, new
bearings, replace motors if needed, check vacuum switch and valve and replace if
needed, new vacuum lines, replace flip-flop assy, check boards, lubrication,
repeatabily and orthogonality test.
- Optics assemblies cleaned and aligned to meet performance specifications or
replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced as
needed
- Replace old monitor with Brand New LCD Monitor
- Perform stage calibrations
- Perform handler calibrations
- Run DBS and SE calibrations
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- Performance specifications returned to original factory specifications
- Machine is fully tested over consecutive days to verify compliance to OEM
specifications
- System locked for transport following proper procedures

Condition:

Excellent Condition Guaranteed.
Fully Refurbished by ClassOne.
6 Month Warranty
30 Day Right of Return.


Delivery:

6-8 weeks

Price:
      ID#:  4227