KLA-Tencor 5200XP Overlay Registration System

Surface Metrology
Model:
KLA-Tencor 5200XP Overlay Registration System for sale
Price:
Request Price Quote     ID#:  XT1084
Picture:
Fully Automated Non-Contact Box-In-Box Measurement for Overlay Registration (stepper alignment), 8"/200mm Wafer Capable System
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Details:

KLA-TENCOR 5200XP OVERLAY REGISTRATION SYSTEM consisting of:


- Model: 5200XP
- Overlay Registration(stepper alignment) and Critical Dimension (CD) Measurement System
- 8"/200mm Wafer Capable System
- Fully Automated Non-Contact Box-In-Box Measurement for Overlay Registration (stepper alignment). The Overlay Registration specification is 4nm per KLA’s published spec sheet
- Fully Automated Non-Contact CD Measurement and we recommend it to be used for CD’s the size of 1.5um or above
- Uses Proven Coherence Probe Microscopy (CPM) Technology
- Lowers Stepper Cost of Ownership. Includes KLASS (KLA Stepper Set-up Software) which allows the calculation of critical parameters for overlay control on lithography tools
- Measures all Layers, including Low-Contrast or Grainy Targets
- Operations Manual for KLA-Tencor 5200XP Overlay Registration System
- Refurbished to Meet Published KLA-Tencor 5200XP Specifications
- We can include installation, training, and warranty

Condition:
Delivery:

8-12 weeks

Price:
      ID#:  XT1084