JEOL JBX-6000FS/E SEM

JEOL JBX-6000FS/E SEM

Other Metrology
Model:
JEOL JBX-6000FS/E SEM for sale
Price:
Request Price Quote     ID#:  M1281
Picture:
JEOL JBX-6000FS/E SEM
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Details:

JEOL JBX-6000FS/E SEM consisting of:

- Model JBX-6000FS/E
- Currently configured for 4"/100mm wafers
- 2"/ 50mm to 6"/150mm wafer size capable
- Auto loader capable of holding up to 12 wafer cassettes
- Capable of handling sample sizes of 0.5mm,10mm,15mm,20mm
- Filament type: zirconium oxide coated tungsten thermal field emitter (ZrO/W TFE)
- Accelerating Voltage Range: 25kV to 50kV
- Beam Diameter:
- 8nm to 0.2um (at 25kV)
- 5nm to 0.1um (at 50kV)
- Shape: Spot Beam
- Current Density:
- 1000Acm2( at 25kV) Max
- 2000Acm2( at 50kV) Max
- Current range: 100pA up to 30nA approx. (depends on aperture used and lens mode)
- Highest Resolution : using 5th Lens mode the beam spot diameter is minimum 5nm with a scan step of 1.25nm
- Scan Speed 250Hz to 12 Mhz
- Highest resolution the Overlay accuracy at highest resolution: 0.04um (2σ)
- Field Stitching Accuracy 0.04um (E-Beam – E-Beam) or +/- 200nm for (Optical – E-Beam)
- Minimum line width 0.02um (at the field Center)

Condition:
Delivery:

2-4 weeks

Price:
      ID#:  M1281