EVG 6200 Automated Mask Aligner

Mask Aligners & Bonders
Model:
EVG 6200 Automated Mask Aligner for sale
Price:
Request Price Quote     ID#:  4269
Picture:
8"/200mm, Top Side Alignment, 3 Cassette Stations, 500W Lamphouse
photo
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Details:

EVG 6200 AUTOMATED MASK ALIGNER consisting of:

- Model: EVG6200 Infinity
- Automated Mask Aligner
- Topside Alignment (TSA), Backside Alignment (BSA) & Bond Alignment
- Automatic Alignment
- 3 Cassette Station Ergo Load Cassette Station
- COGNEX PatMax Vision Software
- NanoAlign Technology Package
- Cassette to Cassette Handling (can also be operated in manual mode)
- Up to 8”/200mm Wafer Capable (with proper chuck)
- Vacuum Chuck: for 8" wafers
- Maskholder: for 9"x9” masks
- Mask Load Frame: for 9"x9” masks
- Can be Operated in Proximity, Soft Contact, Hard Contact or Vacuum Contact Exposure Modes
- Tooling Exchanges are Quick, Simple and can be Performed Within Minutes
- Lamphouse: 1000W Lamphouse
- Exposure Optics: Type C, 350nm - 450nm, Broadband
- Motorized Alignment Stage (X, Y, Theta Directions) to the 3-Axis Joystick
- Alignment Accuracy: <1.25um for Backside Alignment; <1um for Topside Alignment; <3um Pre-Bond Bond Alignment (These values were set by EVG using standard EVG process and materials, and under optimal cleanroom conditions. ClassOne strives to meet these values however they may vary depending on the customer''s process and cleanroom conditions)
- Light source radiation uniformity <3%
- Microsoft Windows based User Interface - System PC, Keyboard, Cables
- Operations Manual for EVG 6200 (English language)

OPTIONS (not included in quote, can be quoted upon request):
- Shadow Mask Alignment
- Other wavelength filter options (200-240um / 240-280nm / 280-350nm)


CLASSONE''S MASK ALIGNER REFURBISHMENT PROCESS consists of:

1) Main System Body:
- Ellipsoidal Mirror Replaced with New
- UV Bulb Replaced with New
- Cold Light Mirror Inspected & Replaced as Needed
- Front Turning Mirror Inspected & Replaced as Needed
- Front Lens Inspected & Replaced as Needed
- Shutter Cylinders Replaced with New
- Mirror House Cylinder Replaced with New
- Lamp Power Supply Tested & Repaired or Replaced as Needed
- Exposure Optics Tested
- Microscope Illumination Bulbs Replaced with New
- Microscope Assembly Inspected and Adjusted as Needed
- Full Optical Alignment of Microscope Performed as Needed
- Machine is Fully Tested to Verify Compliance to Original Specifications
- WEC Head Rebuilt
- Pneumatic Regulators Inspected & Replaced as Needed
- Machine Covers are Repainted or Replaced as Needed

2) Isolation Table:
- Isolation Table Air Bags Inspected & Replaced as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Air lines Inspected & Replaced as Needed
- Wheels Inspected & Replaced as Needed
- Leveling Feet Inspected & Replaced as Needed

3) If Applicable:
- Transport Slide Rebuilt
- Pre-Aligner Assembly Rebuilt
- Wafer Alignment Stage Rebuilt
- Cassette Elevator Rebuilt


INSTALLATION AND SUPPORT WORLDWIDE OF EVG MASK ALIGNERS:


- ClassOne Supports all its Used and Refurbished EVG Mask Aligners with Spare Parts and Service Worldwide
- Installation & Training Available Worldwide
- Learn more: http://www.classoneequipment.com/content/mask-aligners

Condition:

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.


Delivery:

10-12 weeks

Price:
      ID#:  4269