EVG 101 Coater

Mask Aligners & Bonders
Model:
EVG 101 Coater for sale
Price:
Request Price Quote     ID#:  4353
Picture:
One resist coat module, currently setup for 4"/100mm wafers, Advanced Spin Coating System
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Details:

EVG 101 ADVANCED SPIN COATING SYSTEM consisting of:

- Model: EVG 101
-Semi-Automatic, with Manual loading
-Suitable for wafer sizes 3" - 8" wafers (with proper chuck)
-Currently configured for 4"/100mm wafers
-One Coat Module
-Base frame for one resist processing module including all electronics, pneumatics, tubing for solvents, drain or dump container, and exhaust lines
-Manual loading and mechanical pre-aligner (pneumatically actuated)
-PC controlled with windows based graphical user interface
-Password protected access levels
-Coat chamber PTFE for spin coating
-Programmable rotational speed for substrate
-Programmable arm for resist dispense and topside EBR
- One Cybor pump
-Syringe dispense option included
-Spinner chuck for 4" wafers
-External Chemical cabinet with two solvents
- Previously used chemistry: 1813, 1827, acetone and IPA.
- Operations Manual and Documentation included.

Condition:

Excellent Condition Guaranteed.
6 Month Warranty and Specifications Guarantee.


Delivery:

10-14 weeks

Price:
      ID#:  4353