Alcatel 601E Deep Reactive Ion Etcher

Plasma Etchers & PECVD
Model:
Alcatel 601E Deep Reactive Ion Etcher for sale
Price:
Request Price Quote     ID#:  4370
Picture:
Alcatel 601HPE Reactive Ion Etcher
photo
photo
photo
Click an image to view full size.
Details:

ALCATEL 601HPE RIE (REACTIVE ION ETCHER) consisting of:

- Model 601HPE Deep Reactive Ion Etcher
- Currently set up for 6" wafers
- RFPP RF5S RF Generator
- Load Lock Turbo Pump
- Vacuum Pump & Chiller
- Pump
- Chiller

Current Gas Configuration:
- CF4
- O2
- HE
- C2F6
- CHF3

Condition:


System is being sold AS-IS/WHERE-IS






Delivery:
Price:
      ID#:  4370